Yttria Ceramic (Y₂O₃), Yttrium Oxide Ceramic

Yttrium oxide(Y2O3) exhibits a high melting point, excellent chemical and photochemical stability, low phonon energy, high thermal conductivity, good light transmission, and exceptional optical transparency. Yttrium oxide ceramics have a wide range of applications, especially in the semiconductor industry. In the semiconductor sector, it is commonly combined with alumina ceramics; for instance, a layer of yttrium oxide is sprayed onto alumina ceramics to produce ceramic windows and related products. From a manufacturing perspective, to meet diverse customer demands, high-purity yttrium oxide raw materials are used. Advanced molding techniques, precise control of high-temperature sintering, and precision processing are employed to create high-precision products.
Specifications and dimensions: Processing can be customized based on drawings or samples.

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Main Products

Yttria Coated Ring

Ceramic Disc

Focus Rings

Ceramic Lift Pin

Features

High-purity yttrium oxide products not only exhibit enhanced wear resistance, effectively resisting abrasion during prolonged use and extending their service life, but they also possess superior corrosion resistance, maintaining a stable chemical structure when exposed to various chemical agents, thereby ensuring the integrity and functionality of the products. Additionally, their mechanical strength is exceptional, allowing them to withstand significant external forces without deformation or damage.

Good thermal stability
Good corrosion-resistant
High thermal conductivity

High dielectric constant
Good heat resistance

Yttrium Oxide Properties

Material Matrix			Yttria
Properties	Item	Unit	TSV-Y100A
Physical Property	Colour		Greyish White
Physical Property	Density	g/cm³	4.9
Mechanical Behavior	Vickers Hardness	GPa	6
	Bending Strength	Mpa	130
	Compressive Strength	Mpa	3000
	Young's Modulus	GPa	160
	Fracture Toughness	Mpa.m^1/2	1.1
Thermal Property	Coefficient of Thermal Expansion	10^-6/°C	7.2
	Thermal Conductivity	W/(m.K)	14
	Specific Heat Capacity	J/(g.K)	0.45
	Maximum Operating Temperature	°C	1800
Electrical Property	Dielectric Strength	kv/mm	11
	Dielectric Constant (1MHz)	-	11
	Dielectric Losses (1MHz)	(X10^-4)	5
	Volume Resistivity 20℃	Ω.cm	>10¹³
	Volume Resistivity 300℃	Ω.cm	10¹⁰

* The listed property values are average results obtained from test samples and are not guaranteed. Please be aware that these values may vary for specific production batches.

Yttrium Oxide Applications in Various Industries

Semiconductor Industry: Precision ceramics made from ultra-high-purity yttrium oxide are used to manufacture integrated circuit substrates. Yttrium oxide ceramics are also commonly used in semiconductor processing equipment, such as optical components in lithography machines and wafer carriers.
Medical Field: In artificial joint replacement surgeries, yttrium oxide is used to create artificial hip and knee joints. Due to its excellent biocompatibility, it can closely integrate with human tissue without triggering an immune rejection response.
Electronics Sector: As a high-frequency insulating material, yttrium oxide is used in the production of microwave devices, radar antenna covers, and more. In 5G communication equipment, its excellent insulating properties and stable dielectric performance ensure minimal signal loss during transmission, thereby improving communication quality and speed. Additionally, yttrium oxide ceramic.