Main Products

Ceramic Chambers and Domes

Ceramic Windows

Ceramic Focus Rings

Ceramic Spin Dryer Chucks

Ceramic Linear Guide Rail

Ceramic Handling Arm

Customized Processing of Ceramic Nozzles

Ceramic Air Bearing Stages

Features

We produce high-purity products with purities of 99%, 99.5%, 99.7%, and 99.9%. These high-purity alumina materials exhibit excellent mechanical strength and corrosion resistance, making them suitable for the manufacture of large-scale products. Additionally, due to their good plasma resistance, these materials can also be used in components for semiconductor CVD equipment or etching devices.

Heat-resistant
Abrasion-resistant
Corrosion-resistant

High dielectric strength
Electrical insulators
Plasma Resistance

Alumina Properties

Material Matrix			Alumina
Properties	Item	Unit	TSV-AZ025A	TSV-A950A	TSV-A990A	TSV-A995A	TSV-A997A	TSV-A997B	TSV-A999A
Physical Property	Content	%	-	95.0%	99.0%	99.5%	99.7%	99.7%	99.9%
	Colour		Milky White	White	White	Milky White	Milky White	Milky White	White
	Density	g/cm³	4.4	3.7	3.8	3.9	3.92	3.94	3.95
Mechanical Behavior	Vickers Hardness	GPa	15	13.7	15.2	16.0	17.2	17.2	17.5
	Bending Strength	Mpa	650	350	310	360	380	380	400
	Compressive Strength	Mpa	-	-	2160	2350	2380	2400	2560
	Young's Modulus	GPa	320	320	360	370	380	380	380
	Poisson's Ratio	/	0.25	0.23	0.23	0.23	0.23	0.23	0.23
	Fracture Toughness	Mpa.m^1/2	5	3-4	3-4	4	4.8	5	5.4
Thermal Property	Coefficient of Thermal Expansion	10^-6/°C	9	7.2	7.2	7.2	7.2	7.2	7.2
	Thermal Conductivity	W/(m.K)	19	24	29	32	32	32	34
	Specific Heat Capacity	J/(g.K)	-	0.78	0.79	0.78	0.79	0.79	0.78
	Maximum Operating Temperature	°C	1600	1500	1600	1600	1600	1600	1600
Electrical Property	Dielectric Strength	kv/mm	-	15	15	15	15	15	15
	Dielectric Constant (1MHz)	-	-	9.4	9.9	9.9	9.9	9.9	9.9
	Dielectric Losses (1MHz)	(X10^-4)	-	4	2	1	1	1	1
	Volume Resistivity 20℃	Ω.cm	>10¹²	>10¹⁴	>10¹⁴	>10¹⁴	>10¹⁴	>10¹⁴	>10¹⁴
	Volume Resistivity 300℃	Ω.cm	-	10¹⁰	10¹⁰	10¹³	10¹³	10¹³	10¹³

* The listed property values are average results obtained from test samples and are not guaranteed. Please be aware that these values may vary for specific production batches.

Alumina Applications in Various Industries

Semiconductor Equipment Parts: Components such as chamber parts, insulating flanges, etching equipment parts, and wafer chucks leverage their high purity, corrosion resistance, and electrical insulation properties to ensure stability and reliability in the semiconductor manufacturing process.
Integrated Circuits: Used as substrates and packaging materials, alumina's excellent insulation and thermal conductivity enhance the performance and heat dissipation efficiency of integrated circuits.
Crusher Components: Internal linings and grinding media for devices like classifiers, air jet mills, and bead mills benefit from high hardness and wear resistance, effectively improving crushing efficiency and extending equipment lifespan.
General Industrial Parts: Components like nozzles for laser processing machines, shafts, and bearings are designed to meet diverse operational demands, thanks to their excellent wear resistance, heat resistance, and mechanical strength.
Wear-Resistant Components: Parts such as guide rollers for drawing machines, wire channels, and rails maintain good dimensional accuracy and surface quality over prolonged friction, reducing maintenance and replacement costs.
High-Precision Tooling: Fixtures and assembly jigs provide high precision and stability for precision machining and assembly, ensuring product quality and production efficiency.
Electrical Insulation Components: Insulators, gaskets, and bushings utilize their superior electrical insulation properties to ensure the safe operation of electrical equipment, preventing issues like leakage and short circuits.
Medical Field: Used as drug carriers and dental restoration materials, alumina exhibits good biocompatibility and chemical stability, posing no adverse effects on the human body.
Engine Components: Parts such as combustion chamber components in automotive engines feature low thermal conductivity and high thermal expansion coefficients, ensuring good performance under high temperatures.
Automotive Parts: Alumina is used in manufacturing spark plug insulators and brake pads, enhancing the performance and lifespan of these components.