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Vacuum Wafer Chucks

High flatness, uniform adsorption, chemical resistance, for clean transfer.

Ceramic vacuum wafer chucks are widely used as fixture tools in the wafer thinning and cutting processes within the semiconductor industry. Our high-purity ceramic components are finely polished for a smooth and flat surface. They are ideal for photolithography and wafer handling applications, ensuring stability and accuracy during high-precision processing. We can design and manufacture various custom chucks according to customer specifications.

Compositions: Alumina, Silicon Carbide, Porous Ceramics
Specifications: Customized on demand
Application: Semiconductor & Electronics, Equipment & Machinery, Medical Devices, Food & Agriculture
Tailored Processing: Customization and reverse engineering based on drawings and samples.
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Product Introduction

Product Description

 

Ceramic vacuum wafer chucks, also known as wafer chucks, are essential components in the semiconductor manufacturing and related precision processing fields. Made from high-purity, high-performance ceramic materials, they feature uniform pore size distribution with interconnected internal channels. Typically disk-shaped, they have an extremely flat and smooth surface, with finely designed vacuum channels and suction holes for holding and securing wafers.

 

 

Features

  • High flatness and parallelism
  • Uniform and dense structure, high strength
  • Good permeability and consistent adhesion
  • Easy to refine

 

Technical Assistance

 

  • Customized products based on customer requirements.
  • Collaborate with customers to improve product design, enhance performance, and reduce costs.
  • Product application tracking and follow-up services.

 

 

Ceramic Expertise

 

Tessvida is a Total Kit Solutions (TKS) specialist, serving key industries: semiconductor & electronics, medical devices, FPD/LED, machinery, petrochemicals, auto & Transportation, energy & power, and food & agriculture. With a mature supply chain and advanced processes (isostatic pressing, gel casting, dry pressing), we offer end-to-end capabilities from material preparation, molding, sintering to precision machining and post-processing.

Backed by deep expertise in high-purity ceramics and strong resource integration, our flexible custom services precisely meet customer needs from material selection to finished product delivery.

 

 

Ceramic Production Process

 

High-Temperature

Powder Preparation

Raw material powder preparation, spray granulation (mixing, mechanical ball milling, spray drying)

01

Powder Forming

Powder Forming

Isostatic pressing, dry pressing, injection molding, gel forming, casting, hot pressing

02

Powder Preparation

High-Temperature Sintering

Atmospheric sintering, vacuum sintering, controlled atmosphere sintering

03

Precision Processing

Precision Processing

Cutting, turning, grinding, milling, shaping, drilling

04

Surface Treatment

Surface Treatment

Cleaning, arc melting, plasma spraying, electrostatic spraying, vapor deposition, ultra-clean cleaning, anodizing, metallization composite

05

 

 

Precision Ceramic Processing Workflow

 

  • Material Preparation

    Material Preparation

  • Material Forming

    Material Forming

  • Sintering

    Sintering

  • Fine Machining

    Fine Machining

  • Inspection

    Inspection

  • Precision Cleaning

    Precision Cleaning

  • Vacuum Packing

    Vacuum Packing

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    Material Preparation

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    Material Forming

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    Sintering

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    Fine Machining

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    Inspection

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    Precision Cleaning

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    Vacuum Packing

 

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